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Secondary Ion Mass Spectrometer Characterizes Solid Surfaces

Secondary Ion Mass Spectrometer CharacterizesSolid Surfaces


Physical Electronics' TRIFT III Time-of-Flight Secondary Ion Mass Spectrometer (TOF-SIMS) is a new surface analysis instrument designed to provide organic and inorganic characterization of solid surfaces such as semiconductors, hard disks, polymers, paint and other surface coatings. The TRIFT III can be used to improve product performance, conduct failure analysis and manage process control.

"Many of our clients, specifically in the polymer market, need to detect and characterize chemical constituents at lower and lower concentration levels to both develop new products and to improve product performance. We've designed the new TRIFT III to provide greater sensitivity for trace elemental and molecular analysis," says Jim Burkstrand, Vice President of Sales.

In addition to the TRIFT III's increased detection limit capabilities, several other features have been enhanced to make the new instrument easy to use. These include expanded software automation for data acquisition and interpretation, improved sample viewing and stage navigation software, and a dual source ion column for depth profiling.

The new TRIFT III will also be made available in a 300mm-wafer version for detection of trace metals on whole semiconductor wafers. This instrument will also accept multiple smaller diameter semiconductor wafers for routine process monitoring.

Physical Electronics
Eden Prairie, MN

Source: PLASTICS Daily News wire service, Business Intelligence Group, Columbia, NJ

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